Value‐added integration of functions for silicon‐on‐glass (SOG) based on LTPS technologies

Abstract— Low-temperature polycrystalline-silicon (LTPS) TFT-LCDs are on their way to becoming advanced displays, which will lead to the use of system-on-glass (SOG) technology. Improvement in poly-Si TFT performance is essential in order for them to become value-added displays, where circuits for various functions are integrated onto the substrate. In this paper, the key processes of the applications for future displays will be described, including the recent development of SOG.