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An ECR ion source for multiply charged heavy ions at 14-GHz
An ECR ion source for multiply charged heavy ions at 14-GHz
1992
M. Sekiguchi
T. Yamada
Y Isoya
M. Fujita
T. Yamazaki
Yukimitsu Ohshiro
Y. Yamashita
A. Kitagawa
Keywords:
Plasma
Ion beam
Atomic physics
Ion gun
Ion beam deposition
Ion
Ion source
Chemistry
ion yield
Materials science
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