Ultra-precise Optical Components with Machinable Silicon Layer

Mark Schürmann,Paul-Johannes Jobst,Norbert Kaiser,Andreas Kolbmüller,Sandra Müller,Andreas Gebhardt,Stefan Risse,Ramona Eberhardt

Ultra-precise Optical Components with Machinable Silicon Layer

2010

Mark Schürmann
Paul-Johannes Jobst
Norbert Kaiser
Andreas Kolbmüller
Sandra Müller
Andreas Gebhardt
Stefan Risse
Ramona Eberhardt

Several micron thick silicon films deposited by magnetron sputtering have a nearly amorphous structure. Optical elements coated with theses films can be machined, polished, and structured in order to achieve ultra-precise optical components.

Keywords:

Thin film
Sputter deposition
Amorphous solid
Polishing
Carbon film
X-ray crystallography
Silicon
Composite material
Materials science
White light interferometry
Optics
Optoelectronics
Micrometre

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