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Hafnium Oxide on Silicon: A Non-Destructive Characterization of the Interfacial Layer
Hafnium Oxide on Silicon: A Non-Destructive Characterization of the Interfacial Layer
2003
D. Wolfframm
S. Kouteva-Arguirova
Tzanimir Arguirov
Reiner P. Schmid
K. Dittmar
I. Zienert
J. Reif
Keywords:
Composite material
Nitrogen
Metallurgy
Annealing (metallurgy)
Metalorganic vapour phase epitaxy
Hafnium oxide
Materials science
Silicon
non destructive
Correction
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