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Materials Characterization and Growth Mechanisms of ZnO, ZrO2, and HfO2 Deposited by Atomic Layer Deposition
Materials Characterization and Growth Mechanisms of ZnO, ZrO2, and HfO2 Deposited by Atomic Layer Deposition
2014
Amir Afshar
Keywords:
Atomic layer deposition
Materials science
Inorganic chemistry
Chemical engineering
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