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Resolution capability of resist patterns and throughput using alkaline treatment under ultrasonic irradiation
Resolution capability of resist patterns and throughput using alkaline treatment under ultrasonic irradiation
2021
Hideto Onishi
Miyake Mikio
Hajime Shirai
Keywords:
ultrasonic irradiation
Materials science
Optoelectronics
Throughput (business)
Resist
Resolution (electron density)
Correction
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