Применение мембранного покрытия SiO 2 для дифференциации локальных газочувствительных свойств пленки SnO 2:Pt в составе однокристальных мультисенсорных систем

We consider features to employ membrane coatings of silicon oxide in order to differentiate local gas-sensing properties of tin dioxide thin films for gas-analytical single-crystal multisensor arrays. It is found that the SiO 2 membrane deposition of homogeneous 7 nm thickness just depresses both the gas response of SnO 2 thin film and gas-analytical power of multisensor array based on this film. Accounting for the performed electrical measurements it is suggested that the exposure of SnO 2 film to Ar + flux radiation accompanying the SiO 2 deposition results in a generation of additional defects at SnO 2 surface layer and, correspondingly, to increase the conducting channel in the film bulk that reduces both its gas response and gas-analytical power under inhomogeneous characteristics. The deposition of the inhomogeneous SiO 2 membrane, up to 24 nm thickness, allows us to significantly increase the selectivity of gas identification with the help of the developed multisensor array.