Slot waveguide electro-optic modulator with ferroelectric oxide BaTiO 3 on silicon

We present design and fabrication of a slot waveguide BaTiO3/Si Mach-Zehnder modulator. Modelling results based on anisotropic finite-difference mode solver show variation of effective index of 1.57×10 and a Vπ·L of 0.98 V·cm. Keywords—silicon integrated photonics, electro-optic effect, slot waveguide, ferroelectric oxide BaTiO3