Quartz wafer or wafer group sensitivity calibration device

The invention relates to a quartz wafer or wafer group sensitivity calibration device, and belongs to the sensor and measurement and control research field. The quartz wafer or wafer group sensitivity calibration device is applied to sensitivity calibration of a single quartz wafer, a single quartz wafer group and multiple quartz wafer groups in three directions of X, Y and Z. The calibration device is composed of a base support, an operation platform, vertical rods, cross rods, loading heads, tensile and compressive strain-type sensors and a plurality of socket head cap screws and a plurality of hexagon nuts. According to the quartz wafer or wafer group sensitivity calibration device of the invention, the loading heads provided with the tensile and compressive strain gauge sensors are adopted to realize loading at the three directions of X, Y and Z; the inner structures of the leading heads are identical; and the tensile and compressive strain gauge sensor on each loading head is connected with a voltage display. The quartz wafer or wafer group sensitivity calibration device has the advantages of simple structure, small size, excellent stability, simple operation, convenient use and low cost, and can realize reliable calibration of the sensitivity of quartz wafers or crystal wafer groups in piezoelectric sensor.