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A Novel Positive Working Photosensitive Polymer For Semiconductor Surface Coating
A Novel Positive Working Photosensitive Polymer For Semiconductor Surface Coating
1997
Hiroaki Makabe
Toshio Banba
Takashi Hirano
Keywords:
Coating
Polymer
Semiconductor
Polymer chemistry
Materials science
Composite material
Nanotechnology
surface coating
photosensitive polymer
Photochemistry
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