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Electron Beam Devices for Materials Processing and Analysis
Electron Beam Devices for Materials Processing and Analysis
2008
H. Bluhm
B. Han
A. G. Chmielewski
D. von Dobeneck
Uwe Gohs
J. Gstöttner
G. Mattausch
Henry Morgner
H.W.P. Koops
A. Reichmann
O. Roder
S.W. Schulz
B. Wenzel
O. Zywitzki
Keywords:
Cathode ray
Spherical aberration
Ion beam
Chromatic aberration
Materials science
Optics
materials processing
Correction
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