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Fabrication of Low-Stress SiN x H y Membranes Deposited by PECVD
Fabrication of Low-Stress SiN x H y Membranes Deposited by PECVD
2007
J-Y Chen
Y. M. Liao
Chien-Chieh Lee
Gou-Chung Chi
Keywords:
Inorganic chemistry
Membrane
Chemistry
Plasma-enhanced chemical vapor deposition
low stress
Chemical engineering
Fabrication
Correction
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