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Peculiarities of electron emission from high-density deep levels of nanodefects in oxygen-implanted silicon
Peculiarities of electron emission from high-density deep levels of nanodefects in oxygen-implanted silicon
2020
Denis Danilov
Oleg Vyvenko
A. S. Loshachenko
N. A. Sobolev
Keywords:
Silicon
Optoelectronics
Electron
high density
Oxygen
Materials science
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