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24aYM-4 Identification of lattice defects in Cu thin film for wiring by Positron annihilation spectroscopy
24aYM-4 Identification of lattice defects in Cu thin film for wiring by Positron annihilation spectroscopy
2005
M. Mizuno
Teruo Kihara
Hideki Araki
Y. Shirai
Takashi Onishi
Y. Itsumi
Keywords:
Thin film
Positron annihilation spectroscopy
Nuclear magnetic resonance
Materials science
Condensed matter physics
lattice defects
Correction
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