Old Web
English
Sign In
Acemap
>
Paper
>
Device Technology for embedded DRAM utilizing stacked MIM(Metal-Insulator-Metal) Capacitor
Device Technology for embedded DRAM utilizing stacked MIM(Metal-Insulator-Metal) Capacitor
2007
Tanigawa Takaho
Yamagata Yasushi
Shirai Hiroki
Sugimura Hirotoshi
Wake Tomoko
Inoue Ken
Sakoh Takashi
Sakao Masato
Keywords:
Capacitor
High-κ dielectric
Metal-insulator-metal
Dram
Materials science
Electronic engineering
Optoelectronics
metal insulator metal capacitor
Correction
Source
Cite
Save
Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI
[]