AY OF NOISE-ACTIVATED NONLIN TORS WITH INTEGRATED ACTUA

This paper reports a robust sensing nonlinear micromechanical resonators for a as resonant mass and thermal radiation sens show stochastic response by applying n resonators show two vibration states, i.e. amplitude state and small vibration amplitu resonator acts as a bistable element, and fr the parallel array, the response can be avera noise can be decreased. We have designe such piezoelectric resonator array with abilit and self-actuation, and demonstrated detection of heat from light. This kind o system can be highly robust against externa potential applications to various sensors o conditions.