New shunt wiring technologies for high performance HDTV CCD image sensors

New shunt wiring technologies for HDTV FIT-CCD image sensors have been developed. They include tungsten direct shunt wiring structure. As well as a new layout for tungsten shunt lines and aluminum bus lines. A 1-inch format 2M pixel FIT-CCD image sensor was fabricated using these technologies. A low smear level, less than -110 dB, was achieved at 1 MHz frame shift frequency. Furthermore, a 1.2*10/sup 5/ electron charge handling capability was obtained up to 1.4 MHz frame shift frequency. >