Energy dispersive X-ray analysis on an absolute scale in scanning transmission electron microscopy.
2015
Abstract We demonstrate absolute scale agreement between the number of X-ray counts in energy dispersive X-ray spectroscopy using an atomic-scale coherent electron probe and first-principles simulations. Scan-averaged spectra were collected across a range of thicknesses with precisely determined and controlled microscope parameters. Ionization cross-sections were calculated using the quantum excitation of phonons model, incorporating dynamical (multiple) electron scattering, which is seen to be important even for very thin specimens.
Keywords:
- Scanning confocal electron microscopy
- Analytical chemistry
- Chemistry
- Optics
- Polymer characterization
- Energy filtered transmission electron microscopy
- Conventional transmission electron microscope
- Energy-dispersive X-ray spectroscopy
- Electron tomography
- Electron beam-induced deposition
- Scanning transmission electron microscopy
- Microscope
- Correction
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