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Comparison of 11.5 μm 2 Stacked Capacitor and Trench Capacitor Cells in Mbit Test Mnmory
Comparison of 11.5 μm 2 Stacked Capacitor and Trench Capacitor Cells in Mbit Test Mnmory
1987
Risch
Sesselmann
Tielert
Keywords:
Capacitance
Capacitor
Doping
Megabit
Optoelectronics
random access memory
Trench
Materials science
Correction
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