Performance Improvement of Peristaltic Micropump Using Various Actuating Signal

2013

Abstract This paper described the development of electrostatically driven peristaltic micropump. The proposed micropump consists of a flexiblemembrane and a single chamber which electrodes are inserted. The single chamber is divided into smaller cells by the electrodes. Thefabricated micropump was operated with four electrodes in the membrane and a various phase sequencing actuation. We studied thechanges in the flow rate corresponding to the actuating signal applied to the micropump under the zero hydraulic pressure differencebetween lnlet port and outlet port. The pump was operated from 60 to 130 V. Whereas the maximum flow rate in basic actuating signal isabout 83 u1/min at 15 Hz, the maximum flow rate in optimized actuating signal is about 114 ul/min at 10 Hz. Keywords : uTAS, Micropump, Peristaltic motion, Electrostatic force ²y mOCI uý, S & . NJDSPGMVJEJDTZTUFN A aPED U?IA:SiCI uý, S & .7CI uýð3aCI uý Ða8 Þ E aE=±QÂ, Sr A²³?×3; Þ×aDi ¨ aÝÞ8>Oi mO A×CI uý Ð>NJDSP5"4 .JDSP5PUBM"OBMZTJT4ZTUFNa A=: ¯K Sr AQI>Þ aQ DÝÝ A²(:Si a¤ S³,yW c³ %/"BOBMZTJTW2 H i & . ESVHEFMJWFSZTZTUFNa A(=I:SiCI uý, S & .7× >>Þ ab|5ýK c²DÝÝ A²Du> O: ¯ oi `d mO A×CI uý, S & .8 d Þð×= >K?8J ÞS ¯× Âw×:ynD `?I J:× vISi ÞD A²D=IÝ:v² ¯D? E o A a E³>yA x5ýI ¯NSi DCI uý ÐD³2n8 ÞÝ$ a³2Ýy7o3eKDÝ xKo 8 > a ÝNe8I ÞSio3eKDÝ xKo 8$ a ´xKNe5ý× yN ' yN ' I N 'aDi ¨ aNeISi a mO\ ¯K@Db28}N a E2 CI uý Ð>?ESi E2 Ð>?ES×I,×O3×c Ew¢II ¹I(, SDN n8PDýz auSÝxIinA²O33X a U> ¹Ýx AIR ný cNtO3DC}a `?o ý W,ýOuSiÝ AE ´: »D E2 Ð×??Do3eK8>N×PD ?a3Ooý E~ & AE y× N '8I ajIIiIÞ a D E2 Ð\7

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