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New insights of boron penetration on dual gate oxide with different thickness
New insights of boron penetration on dual gate oxide with different thickness
2001
Chou-Sheng Wang
Da-wei Lin
Shichang Sun
Z. M. Chau
Charles C K Cheng
Chao-Hung Lin
Keywords:
Electronic engineering
Gate oxide
Boron
Engineering
Penetration (firestop)
Correction
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