Update on rapid appraisal

A scanning corpuscular-beam transmission-type microscope including an energy analyzer below the specimen and a first deflection system disposed between the beam source and the specimen. A second deflection system is disposed between the specimen and the energy analyzer for redirecting the beam to the input aperture of the energy analyzer and is rotated with respect to the first deflection system to compensate for rotation of the specimen image by the objective lens of the microscope.