Diamond film and manufacturing method thereof

PROBLEM TO BE SOLVED: To provide a diamond thin film structure having sufficiently low density of lamination defects and threading dislocations, and to provide a method for producing the same. SOLUTION: The diamond thin film structure comprises: a substrate; a masking material covering a part of the principal orientation plane of the substrate; and a diamond thin film epitaxially growing from the surface of the principal orientation plane of the substrate, wherein the diamond thin film is formed on the masking material, the crystal orientation of the diamond thin film is aligned with the crystal orientation of the substrate, a stripe-like groove is formed in a part of the principal orientation plane of the substrate, and the masking material is arranged so as to cover the stripe-like groove. COPYRIGHT: (C)2011,JPO&INPIT