Influence of Aluminum Doping on Structural, Morphological and Optical Properties of AZO Thin Films Prepared by Sol-Gel Dip Coating

Aluminum doped Zinc Oxide (AZO) thin films with 0-5at.% aluminum content were prepared by Sol-gel dip coating technique. The thickness of the films measured using alpha step method. The structural and morphological properties are studied respectively using X-Ray Diffraction (XRD) technique and Scanning Electron Microscopy (SEM). Higher intensity Zinc Oxide (ZnO) peak (002) is observed in 1at.%Aluminum doped film with 450°C of annealing temperature. The grains are more densely packed in the films doped in 1at.% Aluminum content. Optical properties of AZO thin films are tested by UV-Visible Spectroscopy, while comparing with all the films 0.5at.% Aluminum doped film produces more than 90% of transmittance.