Photonic amorphous silicon device technology

Optically smooth hot-wire deposited films were characterized with respect to the photonic application by examination of the slab wave guiding of the room temperature bulk photoluminescence. Films displayed strong photoluminescence as well as strong slab wave guiding of the light to the edge. These properties are consistent with materials suitable for photonic engineering. Waveguide structures were prepared using previously described hydrogen implantation techniques and tested using novel methods. We report the first successful demonstration of refractive index engineered amorphous silicon devices.