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Low Noise GaAs P-HEMTs Recessed by ECR Plasma Etching
Low Noise GaAs P-HEMTs Recessed by ECR Plasma Etching
1997
Hyun Tae Choi
Jin-Hee Lee
Hyung-Sup Yoon
Byung-Sun Park
Chul Soon Park
Kwang-Eui Pyun
Keywords:
Plasma etching
Electronic engineering
Engineering
Electrical engineering
low noise
Optoelectronics
Correction
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