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Energy and charge distribution of Si ions in EUV ablation plasma
Energy and charge distribution of Si ions in EUV ablation plasma
2021
Nozomi Tanaka
Ryo Deguchi
Nao Wada
Hiroaki Nishimura
Keywords:
Atomic physics
Charge density
Extreme ultraviolet lithography
Energy (signal processing)
ablation plasma
Materials science
Ion
Correction
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