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Highly Uniform RTP Growth and Characterisation of Ultra-Thin Oxynitride Dielectrics Grown in N2O
Highly Uniform RTP Growth and Characterisation of Ultra-Thin Oxynitride Dielectrics Grown in N2O
1994
Wrixon
OSullivan
Mathewson
Keywords:
Ellipsometry
Dielectric
Logic gate
Optoelectronics
Materials science
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