Design, Construction, and Operation of a Laboratory Scale Reactorfor the Production of High-Purity, Isotopically Enriched Bulksilicon

LBNL Report 56760 Design, construction, and operation of a laboratory scale reactor for the production of high-purity, isotopically enriched bulk silicon December 20, 2004 J. W. Ager III, J. W. Beeman, and W. L. Hansen Electronic Materials Program, Materials Sciences Division, Lawrence Berkeley National Laboratory, Berkeley, CA 94720 E. E. Haller Electronic Materials Program, Materials Sciences Division, Lawrence Berkeley National Laboratory, Berkeley, CA 94720 and Materials Science and Engineering Dept., University of California at Berkeley, Berkeley, CA 94720 This work was supported by the Initiatives for Proliferation Prevention Program of the Office of Nonproliferation Research and Engineering (NN-20) of the U. S. Department of Energy under contract DE- AC03-76SF00098.