Heating device applied in low-temperature polysilicon heating technology and heating method

The invention provides a heating method applied in a low-temperature polysilicon heating technology and a heating device. The heating device comprises a heating chamber, a radiation heater and an absorber plate. The radiation heater is arranged on the outer side of the heating chamber and is used for supplying radiation heat into the heating chamber. The absorber plate is disposed inside the heating chamber and can absorb the radiation heat of the radiation heater. An object to be heated can be placed on the absorber plate. When the object to be heated is placed on the absorber plate in the heating chamber and is contacted with the absorber plate, the object receives the radiation heat of the radiation heater and simultaneously the absorber plate utilizes the absorbed radiation heat to heat the object in a contact way. Advantages of radiation heating mode and contact heating mode are integrated, the problem that radiation heating equipment is not easy for large scale and distribution of temperature is nonuniform is improved, and heating rate is raised.