PRESSURE SENSOR FOR HOSTILE MEDIA

Abstract Measuring pressure in hostile media such as toxic, flammable, explosive, biologically contaminated, corrosive ones is of paramount importance. Many commercially available pressure sensors fail to measure in such conditions because of physico-chemical degradation. It is the aim of this paper to present a pressure sensor that is able to withstand all such harsh conditions. The idea is based on the “More-than-Package” concept developed previously. Concept, simulation and characterization of such a device are described. The pressure signal is sent to outer environment without any electrical interconnects crossing the separation wall between the hostile medium and the outer environment. A magnetic field is used for transferring the displacement of the inner sensing membrane element situated in the harsh environment to the external part containing the magnetic sensing unit.