APSUNY Process Design Kit (PDKv3.0): O, C and L Band Silicon Photonics Component Libraries on 300mm Wafers

Erman Timurdogan,Zhan Su,Ren-Jye Shiue,Christopher V. Poulton,Matthew J. Byrd,Simon Xin,Michael R. Watts

APSUNY Process Design Kit (PDKv3.0): O, C and L Band Silicon Photonics Component Libraries on 300mm Wafers

2019

Erman Timurdogan
Zhan Su
Ren-Jye Shiue
Christopher V. Poulton
Matthew J. Byrd
Simon Xin
Michael R. Watts

An updated process design kit (APSUNY PDKv3.0) is introduced with verified passive and active O+C+L band silicon photonics component libraries, which includes 50Gbaud (100Gbps) capable modulators, high yield splitters and detectors on 300mm SOI wafers.

Keywords:

Silicon photonics
Silicon on insulator
Detector
Wafer
Optoelectronics
Process design
Optics
L band
Engineering

Correction
Source
Cite
Save
Machine Reading By IdeaReader

References

Citations