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Three-dimensional trajectory simulation of scattered electrons in scanning electron microscope specimen chamber
Three-dimensional trajectory simulation of scattered electrons in scanning electron microscope specimen chamber
2017
Kazumasa Terada
Yoshifumi Hagawara
Masatoshi Kotera
Keywords:
Scanning electron microscope
Electron beam-induced deposition
Conventional transmission electron microscope
Environmental scanning electron microscope
Annular dark-field imaging
Electron microscope
Scanning transmission electron microscopy
Electron
Materials science
Optics
Analytical chemistry
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