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Semi-insulating GaAs layers doped with oxygen by high energy ion implantation
Semi-insulating GaAs layers doped with oxygen by high energy ion implantation
1975
P. N. Favennec
J.F. Palmier
Keywords:
Thin film
Ion implantation
Electronic band structure
Oxygen
Doping
Gallium arsenide
Inorganic chemistry
Analytical chemistry
Materials science
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