Investigations of electron emission from DLC thin films deposited by means of RF PCVD at various self-bias voltages

The aim of this paper is to report the results of field emission experiments on undoped, flat diamond-like carbon (DLC) thin films deposited at various self-bias voltages using radio frequency plasma chemical vapor deposition (RF PCVD) technique. It has been observed that the emission properties improve when the absolute value of self-bias voltage becomes higher, e.g., the turn-on field value decreases. The correlation between electron field emission and sp content in these films showed improvement of electron emission properties of DLC films for higher amount of sp phase. Keywords—DLC, RF PCVD, Raman spectroscopy, turn-on field, electron emission, effective work function.