Thermal analysis of cantilever MEMS based Low power microheater array for the selective detection of explosive and toxic gases

A cantilever type microheater array consisting of four individual isolated microheaters on single die has been designed here for MEMS based gas sensor platform using metal oxide semiconductor for different gas detection through a single sensor die for explosive and toxic gas analysis in the underground manhole. A thin SiO 2 /Si 3 N 4 cantilever of 250µn X 100µn has been designed here for low power consumption and uniform temperature distribution throughout the entire active area. As the microheaters are isolated from each other, different temperatures may be achieved by applying different voltages in different heaters.