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Evaporation of Phosphorus in Molten Silicon with Electron Beam Irradiation Method
Evaporation of Phosphorus in Molten Silicon with Electron Beam Irradiation Method
2003
Kazuhiro Hanazawa
Noriyoshi Yuge
Shoichi Hiwasa
Yoshiei Katou
Keywords:
Metallurgy
Cathode ray
Evaporation
Irradiation
Materials science
Electron beam physical vapor deposition
Phosphorus
Silicon
Vapor pressure
electron beam irradiation
molten silicon
Correction
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