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High-Efficiency Amorphous Silicon Devices on LPCVD-ZnO TCO Prepared in Industrial KAI TM-M R&D Reactor
High-Efficiency Amorphous Silicon Devices on LPCVD-ZnO TCO Prepared in Industrial KAI TM-M R&D Reactor
2009
L. Castens
G. Monteduro
M. Marmelo
J. Steinhauser
Julien Bailat
J. Hotzel
U. Kroll
J. Meier
E. Vallat
Daniel Borrello
Stefano Benagli
Keywords:
Amorphous silicon
Chemical vapor deposition
Solar cell efficiency
Materials science
Plasma-enhanced chemical vapor deposition
Inorganic chemistry
Optoelectronics
Deposition (law)
Correction
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