Model Improvement of Miniature Switched Capacitor Used in High Speed Applications

In this work, it is shown that the spring constant model for rectangular fixed–fixed beam used in the literature for high-speed applications is not correct and the model is improved for all fixed–fixed beams with a desired symmetrical shape. The new model is used to calculate the resonance frequency of the fabricated high-speed-specific 3D bridge named boat-like shape beam existing in the literature. The comparison shows that the model result is in good agreement with the simulation and measurement results. Also, the concept of the miniature microelectromechanical systems switched capacitors will be explained and it is shown that the rectangular beam with a simple fabrication process can be designed to achieve high speed about 150 ns like a boat-like shape beam which needs to two specific lithography processes that are so involved.