Design, Modeling, and Optimization of a Bistable Electromagnetic Actuator With Large Deflection

This letter presents the design, modeling, and optimization of a bistable electromagnetic actuator of size 2.2 mm × 2.2 mm, consisting of a hard magnet membrane, a planar coil, and a permanent magnet. An analytical model is established to calculate the magnetic field generated by the coil, which is validated by the finite-element method. Based on the theoretical analysis of magnetic force, the actuator's parameters are optimized to maximize the magnetic force for large deflection. Moreover, a multiphysics simulation is implemented to characterize the electromagnetic and mechanical performance to predict the static response. We developed an actuator with process feasibility and a deflection of 140 µm, which can maintain the pull-in state without power consumption. The simulation and analytical results are in good agreement, demonstrating the accuracy and practicality of the methodology for a wide spectrum of electromagnetic actuators.