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Optical Characterization of DLC Films by Spectroscopic Ellipsometry
Optical Characterization of DLC Films by Spectroscopic Ellipsometry
2016
Yoko Wasai
Masayuki Sakurai
Takumi Moriyama
Nataliya Nabatova-Gabain
Keywords:
Ellipsometry
Analytical chemistry
Materials science
spectroscopic ellipsometry
Optoelectronics
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