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The Influence of Isothermal Hydrogen Annealing on Electrical Properties of Polycrystalline‐Silicon Films
The Influence of Isothermal Hydrogen Annealing on Electrical Properties of Polycrystalline‐Silicon Films
1986
C. Y. Lu
N. S. Tsai
Keywords:
Polycrystalline silicon
Annealing (metallurgy)
Hydrogen
Isothermal process
Chemistry
Inorganic chemistry
Chemical engineering
Analytical chemistry
hydrogen annealing
Correction
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