(Cr, Me)N coatings deposited in a vacuum furnace by magnetron sputtering of a ferrochromium alloy

Abstract Wear-resistant and decorative (Cr, Me)N coatings are deposited on Cr12MoV steel by magnetron sputtering of a FeCrC200 target in a single-chamber vacuum furnace with a graphite heater and a heat-isolative chamber made of carbon wool. A magnetron designed for work at temperatures up to 1000 °C has been used. The chemical and phase compositions of the coatings, the lattice parameter and texture coefficient were determined by XRD, GD-OES and X-ray microanalyzer methods. Their microhardness have also been investigated.