High intensity electron cyclotron resonance proton source for low energy high intensity proton accelerator

Electron cyclotron resonance (ECR) proton source at 50 keV, 50 mA has been designed, developed, and commissioned for the low energy high intensity proton accelerator (LEHIPA). Plasma characterization of this source has been performed. ECR plasma was generated with 400–1100 W of microwave power at 2.45 GHz, with hydrogen as working gas. Microwave was fed in the plasma chamber through quartz window. Plasma density and temperature was studied under various operating conditions, such as microwave power and gas pressure. Langmuir probe was used for plasma characterization using current voltage variation. The typical hydrogen plasma density and electron temperature measured were 7×1011 cm−3 and 6 eV, respectively. The total ion beam current of 42 mA was extracted, with three-electrode extraction geometry, at 40 keV of beam energy. The extracted ion current was studied as a function of microwave power and gas pressure. Depending on source pressure and discharge power, more than 30% total gas efficiency was achie...