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Spindt-emitter fabrication using sputtering deposition
Spindt-emitter fabrication using sputtering deposition
2012
Yoshida Tomoya
Nagao Masayoshi
Koda Nobuko
Nishi Takashi
Nakano Takeo
Keywords:
High-power impulse magnetron sputtering
Sputter deposition
Common emitter
Field emitter array
Electronic engineering
Materials science
Analytical chemistry
Fabrication
Optoelectronics
Correction
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