Old Web
English
Sign In
Acemap
>
Paper
>
Preparation of TiN Films by Magnetron Sputtering and Diagnostics for Optical Emission of Magnetron Plasma
Preparation of TiN Films by Magnetron Sputtering and Diagnostics for Optical Emission of Magnetron Plasma
1995
Yasuki Aihara
Yuko Hirohata
Tomoaki Hino
Toshiro Yamashina
Keywords:
Sputter deposition
Plasma
High-power impulse magnetron sputtering
Cavity magnetron
Tin
Analytical chemistry
Chemistry
Optoelectronics
Atomic physics
optical emission spectroscopy
Correction
Source
Cite
Save
Machine Reading By IdeaReader
1
References
1
Citations
NaN
KQI
[]