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Deposition mechanism of thin Si and Ge films promoted by liquid-phase reduction under ballistic hot electron incidence
Deposition mechanism of thin Si and Ge films promoted by liquid-phase reduction under ballistic hot electron incidence
2017
Ryutaro Suda
A. Kojima
Nobuya Mori
Jun-ichi Shirakashi
Nobuyoshi Koshida
Keywords:
Deposition (law)
Analytical chemistry
Electron
Materials science
liquid phase
hot electron
Correction
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