A new method for electron diffraction based analysis of phase fractions and texture in thin films of metallic nano-crystals

X-ray diffraction (XRD) based determination of phase fractions from powder samples has been common since the introduction of the Rietveld-method. Similar method did not exist for electron diffraction (ED), mainly due to the dynamic nature of ED. The last decade saw a boom in nano-technology and most of the transmission electron microscopy (TEM) laboratories frequently deal with nanocrystalline thin films. For these samples the kinematical approximation is acceptable.