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A New Compact Surface Wave Plasma Source for Multiple Plasma Source Setup Aimed for Depositing Large-area Diamond.
A New Compact Surface Wave Plasma Source for Multiple Plasma Source Setup Aimed for Depositing Large-area Diamond.
2018
Hyun Jong You
Oleksii Girka
Keywords:
Diamond
Plasma
Surface wave
Analytical chemistry
Materials science
Optoelectronics
Correction
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