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A Novel Transmission line model of Cutoff Probe for precise measurement of high density plasma
A Novel Transmission line model of Cutoff Probe for precise measurement of high density plasma
2016
Sijun Kim
Jang Jae Lee
Gwang-Gi Kim
Ba-Da Lee
Hui-Jung Yeom
Yeong Seok Lee
Dae Ung Kim
Jeong Hyeong Kim
Keywords:
Plasma
Microwave probe
Transmission line
Optics
high density
Plasma diagnostics
Cutoff
Materials science
Correction
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